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The ECLIPSE
Integrated Wafer Line From Sawn Ingot to Packaging
THE COMPLETE WAFER LINE SYSTEM COMPRISING WAFER PRE-WASH, FINE WASH, METROLOGY, SORTING AND PACKAGING FUNCTIONS
Our latest wafering tool for the Solar industry accepts blocks of silicon that have been sawn into 600 wafers 150 microns thick, it deglues the wafers which are then cleaned, singulated and packed. We believe the ECLIPSE is not only the only tool on the market to currently do this but achieves this within a tool envelope smaller than most semi-automatic tools. The tool is fully automatic and incorporates saw fixture and end cheek removal. Monocrystaline and poly substrates are accommodated and the glue residue does not require manual intervention. Process water reclaim is used to reduce the Cost of Ownership.
Process
Pre-wash → De-glue → Removal of fixture → Singulation → Fine wash → Dry → Metrology → Sorting → Packaging
Silicon Wafer Pre-Clean & De-Glue Station
The innovative technology behind the Solar Semi Engineering wafer pre-cleaning and de-glue station ensures consistently high throughput coupled with optimum cleaning results & helps to minimise environmental impact
Our pre-clean & de-glue stations are built robustly to operate reliably under constant operation, with uptime greater than 95%. Capable of handling a total block length of up to 2000mm per bath with a max individual block length of 500mm. Numerous block size configurations are possible.
The CME wafer pre-clean & de-glue station sits between the block wire sawing operation and the wafer separation process. This initial cleaning and de-gluing process is vital in ensuring the removal of saw slurry before separation and singulation. This tool is currently in operation in multiple production lines in Europe and Asia.
Feed Stock Etch Bench
The flexible nature of the SSE Ltd Feed Stock Etch bench enables us to provide you with an automated wet process solution tailored to your specific needs.
The design of SSE wet process benches is based on over 30 years experience in the design and manufacture of wet process equipment, this level of experience allows us to provide solutions to meet specific customer needs.
The fully automated Feed Stock units are capable of cleaning and etching reclaimable silicon prior to recasting. A wide choice of baths and worktop fitments mean a broad variety of process configurations can be installed to suit processing requirements.
The design of our Feed Stock Etch benches allows for the addition of infeed (unprocessed weight) and outfeed (processed weight) inline weigh scales and drying ovens.
No chemicals are stored in the bench and all are diluted once inside the process baths, thus helping to reduce the threat of corrosion.
Useful Information
Build Options
- Conveyor infeed / outfeed or load in / out drawers
- In-line weigh scales (both pre & post processing)
- Chemical dosing & dispense systems
- Hot air drying oven
- RFID tagging for baskets
- FMGlobal 4910 material options
- Fire suppression system
AURORA HF Vapour Tool
HF Vapour processing is widely used in semiconductor industry, the two principal applications are mems structure release and pre-deposition cleans. The vapour process allows you to etch significant amounts of oxide without having any liquid in contact with the surface which can lead to:-
1.stiction of mems structures or
2.the need to rinse off the etchant with water which results in changing the surface state of the wafer away from the desired oxide free state .
The oxide etching process itself will generate water so the vapour process are a delicate balance of removing the by-products and keeping the reaction etching at the desired rate.
6HF + SiO2 H2SiF6 + 2H2O
H2SiF6 SiF4 + 2HF
Selectivity with other materials on the surface can be adjusted by adjusting the exact conditions of the process which is extremely important in mems release processes which can last for several hours.
Pre conditioning of the wafers and post conditioning of the wafers after etching are also important parameters in ensuring the desired process results on the wafer and from wafer to wafer and batch to batch.
The solar semi platform is unique in the industry in that it gives the user the widest range of processing capability
Pressure control from 10 torr to atmospheric
Temperature control from ambient to 70C
Precise injection of alcohol, HF and N2
Integrated pre conditioning and post process conditioning
1-25 wafers
Pieces to 300mm
ST device from EE times
Colorado nanofabrication lab
Fully Automated Wet Bench
SSE custom designed Fully Auto Wet benches are a proven design offering cost effective automated wafer processing.
The design of the SSE wet process bench range is based on over 30 years experience in the design and manufacture of wet process equipment, this level of experience allows us to provide solutions to meet specific customer needs.
A wide choice of baths and worktop fitments, means a broad variety of process configurations can be installed to suit processing requirements. All our benches are designed and constructed to meet our customers individual specifications and requirements
Useful information
Features
- Rear mounted robot and plumbing allows for easy and safe servicing
- Construction materials chosen specifically to suit chemistry used
- “Stand alone” or “through the wall” positioning
- Interlocked clear PVC visors allow full visibility of process whilst maintaining operator safety
- Sunken worktop modules with high velocity lip extraction ensure efficient removal of process fumes
- Work area design allows for full integration of specific process baths and fitments
- Design allows for completely automated throughput where required
- User friendly “touch screen” HMI
- Heated or ambient baths with filtered recirculation system
- Chemical dosing
Build Options
- Dispensing of acids and solvents integrated with ease
- Disabling safety level sensors fitted to all heated process baths
- Range of modular worktops fitments available
- HMI in upper panel or on movable arm
- Indication of dispense cabinet operation
- Automatic actuation of fire suppression system
- Main machine interface unit to control all process baths
Semi Automated Wet Bench
The Semi Auto bench range was designed using computer modelling of the airflow patterns through the cross-sectional profile in the same way as our Lo-Ex manual bench range. This has resulted in an extremely efficient airflow through the work area, eliminating vortices or stagnant regions, this helps to avoid the collection of airborne particulate generated by the operator during normal everyday use. This innovative design features allow up to 40% reduction on fume extract volumes in comparison to balanced air input extract system.
The Semi auto bench robot arms can handle up to a maximum of 20Kg of wafers in either one or two cassettes.
A typical bench layout would be single line process tanks. Etching tanks are constructed from PFA, PVDF or natural polypropylene and thermo-circulated for temperature control. Recirculating filter units can be incorporated into the etch tank systems to reduce particulate contamination levels. Quartz or stainless steel heated tanks are used when elevated process temperatures are required for acids or solvents.
The quick dump rinse (QDR) units are fabricated from PVDF or natural polypropylene. PFA pipework is used throughout for ultra pure water. The quick dump rinse tanks are designed to discharge directly into the plenum base or DI reclaim. The plenum can accommodate not only the extract ductwork, but also the drainage and all incoming services to the worktop, as well as the chemical supply lines.
Useful information
Features
- Full operator protection via interlocked visors
- Reliable, field proven auto arm mechanism utilising chemical compatible materials
- Acid and solvent resist process controls
- Programs, alarms and machine status interface through HMI
- Solvent stations manufactured from stainless steel (ATEX compliant)
Build Options
- Dispensing of acids and solvents integrated with ease
- Disabling safety level sensors fitted to all heated process baths
- Range of modular worktops fitments available
- DI / Town water rinse guns
- HMI in upper panel or on movable stainless steel arm
- Indication of dispense cabinet operation
- Main machine interface unit to control all process baths
- Spin Rinse Dryers
- ATEX compliant solvent benches in Stainless steel
- Automatic actuation of fire suppression system (solvent benches)
Lo-Ex Wet Process Benches
Manual wet chemical processing systems designed for Class 10 clean room use, incorporating innovative design features with proven performance.
The Lo-Ex bench range has been designed using computer modelling of the airflow patterns through the cross-sectional profile.
This has resulted in an extremely efficient airflow through the work area, eliminating vortices or stagnant regions, this helps to avoid the collection of airborne particulate generated by the operator during normal everyday use.
The innovative design features of the Lo-Ex bench allow up to a 40% reduction on fume extract volumes in comparison to balanced air input extract systems. This very significant reduction helps the client reduce their carbon footprint.
Useful information
Features
- Design allows up to 40% reduction on fume extract volumes, which results in lower running costs
- Lo-Ex design helps to reduce carbon footprint
- “Stand alone” or “Through wall” positioning
- Profiled visor deflects air stream and creates low turbulence air curtain
- Unit stands in Class 10 VLF rooms or under standard clean air canopies
- Sunken worktop modules with high velocity lip extract ensures removal of process chemical fumes
- Rear wall extract with adjustable control to allow “tuning” in specific areas
- Visual indicators at face level are sealed from the environment
- All manual controls sited below clear profiled PVC covers or via remote mounted HMI
- Acid and solvent resistant process controls
Build Options
- Extract take off fitted to base or rear wall
- Dispensing of acids and solvents integrated with ease
- Disabling safety level sensors fitted to all heated process baths
- Range of modular worktops fitments available
- HMI on movable arm
- Indication of dispense cabinet operation
- Automatic actuation of fire suppression system
- Main machine interface unit to control all process baths
Porous silicon is produced on silicon wafers using an anodising process that creates films with controllable pore sizes ranging from angstroms to tens of microns in diameter. It has been used in applications as diverse as tyre pressure sensors to solar cell development to ophthalmic drug delivery systems. Due to silicon’s ability to be dissolved by the body, many researchers are working on biotechnology products that carry anti-cancer products directly to the tumour, or on micro dosing systems that are implantable.
It is relatively simple to produce small amounts of porous silicon in the lab, however as the process uses HF acid and alcohol coupled with considerable electric current, scaling up the process to pilot line or HVM requires expertise not normally found outside of our industry.
Micro Carriers:
These microscopic discs, made of porous silicon, can be used to deliver nanoparticles to tumours to treat cancer.
The University of Texas
We currently offer three variations of this tool:-
A single wafer lab tool for round or square wafers with up to two chambers
A pilot line tool that has a four or six wafer tray
A HVM system with automation that can hold trays with up to 36 wafers/tray
A silicon channel plate for x ray detection formed by Porous silicon
Component Cleaning Stations
Our range of ergonomically designed custom automated & manual cleaning stations provide customers with a cost effective solution to cleaning components and quartz ware tubes
The automated quartz ware tube cleaning station has been designed to be ergonomic. This has resulted in improved ease of use for the operator, thus helping to improve throughput, reduce operator tiredness and the potential of expensive breakages during normal use.
Useful information
- Designed to handle tubes of various length’s with diameters between 152mm & 260mm
- Fully automatic operation (manual version available for less demanding applications)
- Constant filtered recirculation of chemical blends
- Ancillary parts cleaning chamber within footprint
- Configurable multiple recipe capability
- Touch screen HMI
- Integral acid storage reservoirs
- DI water rinsing with N2 and hot N2 drying facilities
Build options
- Extract take off fitted to base or rear wall
- Range of modular worktops fitments available, all in compatible materials
- Dispensing & dosing of acids and solvents integrated with ease
- Remote Chemical Dispense Modules
- Disabling secondary level sensors fitted to heated process tank
- Hand wheel tube rotator available on manual model
Large Substrate Etch & Clean
A solution for your biggest challenges
Processing of large billets, blocks and rods
- Automatic handling of large and heavy substrates such as silicon billets/blocks/rods for the purposes of etching, cleaning and other chemical processing.
- Contained and extracted tool for removal of hazardous fumes
- Safety interlocks protect operators from hazardous chemicals and fumes
- Flexible interfacing with your upstream and downstream processes
- Comprehensive safety interlocks
- Multiple robots to optimise throughput and minimise contamination (optional)
- Modular construction to allow convenient transport, entry to building and installation
- Integrated controls with factory interfaces
- Real time chemical analysis and automatic chemical dosing option if required
- Built-in heating and cooling where needed
- Recirculation where needed
- In-bath substrate movement system to avoid dead spots in support locations
- Optional wrapping station for transport cleanliness
Substrates
Monocrystalline silicon billets & rods
Multicrystalline silicon billets & blocks
Quartz rods and tubes
Other large rigid substrates
Substrate size
Up to 5m long
Up to 300mm diameter/cross section
For more information please download our brochure
Chemical Delivery Systems
SSE offer cost effective solutions for the safe and efficient delivery and dosing of chemicals
Most Chemical Delivery Modules produced by Solar Semi Engineering are custom built to meet our customer’s exact requirements, and as such offer cost effective solutions for applications that are required to be accurate, reliable and safe.
They have the added benefit of reducing chemical impurities and in some cases can be more cost effective by allowing the purchasing of chemicals in larger containers. These units also help avoid some of the safety implications associated with manual handling of containerised chemicals regardless of container size.
Our CDM’s can be designed to work with single or multiple containers from 30 litres to 200 litres.
Optional built in roller beds can help reduce manual handling effort, a custom built trolley can also be provided, which allows the containers to be easily transferred into the CDM
Where solvents are used, the CDM can be constructed in stainless steel and equipped to ATEX standards
Useful information
Build Options
- Stand alone
- HMI or switch/LED panels
- Remote status panels
- ATEX compliant (where required)
- Fire suppression system integration
- Drum transport trolleys
- Easy load roller beds
- Manual or automatic DI flushing
- Various spray gun options
Our Flexible Chemical Delivery Modules are an extremely cost effective solution where a chemical delivery system requirement exists for chemicals that are stored in bulk vessels.
They have the added benefit of reducing the potential of chemical impurities which can occur when decanting into smaller containers. It may also be that cost savings can be made in some cases due to purchasing of chemicals in bulk quantities.
These units can also help avoid some of the safety implications associated with manual handling of containerised chemicals regardless of container size.
It is possible to link several of these modules to one control panel with an HMI for ease of operation. The controls also control the pump flush facility for safer pump replacement and servicing.
Chemical Waste Collection
SSE Chemical Waste Collection Systems offer a cost effective solution for the safe and efficient collection or transfer of waste chemicals.
All waste collection systems produced by SSE are built to meet our customer’s specific requirements, and as such offer cost effective solutions for the collection and storage of machine tool or process waste.
Our waste collection systems can be designed to work with single or multiple containers in plastic or metal from 30 litres to 500 litres. We can even supply combined dispense/collection units should available space be at a premium.
Useful information
Build options
- Stand alone or fully integrated
- Fully automatic operation
- Rapid tank evacuation times
- Easy removal & change over of containers
- Custom footprint
- Solvent or acid resistant materials
- Fully enclosed design with extract plenum
- Integral or remote control / status panel
- ATEX compliant solvent units
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